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[IEEE 2012 IEEE 39th International Conference on Plasma Sciences (ICOPS) - Edinburgh (2012.07.8-2012.07.13)] 2012 Abstracts IEEE International Conference on Plasma Science - 2D numerical simulation of capacitively coupled RF plasma shower device

✍ Scribed by Atanasova, M.; Degrez, G.; Benova, E.; Carbone, E. A. D.; Mihailova, D.; van der Mullen, J.

Book ID: 121464617
Publisher: IEEE
Year: 2012
Weight: 97 KB
Category: Article
ISBN: 1457721287
DOI: 10.1109/PLASMA.2012.6383623

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