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[IEEE 2012 IEEE 39th International Conference on Plasma Sciences (ICOPS) - Edinburgh (2012.07.8-2012.07.13)] 2012 Abstracts IEEE International Conference on Plasma Science - IEDF control using multifrequency harmonic drive

โœ Scribed by Clark, D. H.; Exum, A.; Shannon, S.; Coumou, D.


Book ID
121757619
Publisher
IEEE
Year
2012
Weight
88 KB
Category
Article
ISBN
1457721287

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