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Numerical modeling of capacitively coupled hydrogen plasmas: Effects of frequency and pressure

✍ Scribed by Novikova, T.; Kalache, B.; Bulkin, P.; Hassouni, K.; Morscheidt, W.; Roca i Cabarrocas, P.


Book ID
115469320
Publisher
American Institute of Physics
Year
2003
Tongue
English
Weight
380 KB
Volume
93
Category
Article
ISSN
0021-8979

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