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Effect of low-frequency power on dual-frequency capacitively coupled plasmas

✍ Scribed by Yuan, Q H; Xin, Y; Yin, G Q; Huang, X J; Sun, K; Ning, Z Y

Book ID: 121483598
Publisher: Institute of Physics
Year: 2008
Tongue: English
Weight: 206 KB
Volume: 41
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/41/20/205209

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