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Field probe for low-pressure capacitively coupled radio-frequency discharge plasmas

✍ Scribed by Dyson, Anthony; Allen, John E

Book ID
121712163
Publisher
Institute of Physics
Year
2002
Tongue
English
Weight
192 KB
Volume
14
Category
Article
ISSN
0957-0233

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In this paper, the electrical discharge characteristics of plasmas generated in coaxial cylindrical electrodes capacitively powered by a radio-frequency power supply at atmospheric pressure are investigated with respect to helium and argon gases. The electrical discharge parameters, voltage (V), cur