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Comparison of atmospheric-pressure helium and argon plasmas generated by capacitively coupled radio-frequency discharge

✍ Scribed by Li, Shou-Zhe; Lim, Jin-Pyo; Kang, Jung G.; Uhm, Han S.


Book ID
121482243
Publisher
American Institute of Physics
Year
2006
Tongue
English
Weight
333 KB
Volume
13
Category
Article
ISSN
1070-664X

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✍ Li, Shou-Zhe; Lim, Jin-Pyo; Kang, Jung G.; Uhm, Han S. πŸ“‚ Article πŸ“… 2006 πŸ› American Institute of Physics 🌐 English βš– 333 KB

In this paper, the electrical discharge characteristics of plasmas generated in coaxial cylindrical electrodes capacitively powered by a radio-frequency power supply at atmospheric pressure are investigated with respect to helium and argon gases. The electrical discharge parameters, voltage (V), cur