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α, γ, and normal, abnormal glow discharge modes in radio-frequency capacitively coupled discharges at atmospheric pressure

✍ Scribed by Moon, Se Youn; Rhee, J. K.; Kim, D. B.; Choe, W.


Book ID
120508862
Publisher
American Institute of Physics
Year
2006
Tongue
English
Weight
814 KB
Volume
13
Category
Article
ISSN
1070-664X

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