Mode coexistence in radio frequency capacitive discharge of flowing argon at atmospheric pressure with bare perforated electrodes

✍ Scribed by Zhang, Jialiang; Jiang, Kuiqiang; Li, Shouzhe; Xia, Guangqing

• Book ID: 122827374
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 594 KB
• Volume: 88
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/j.vacuum.2012.02.012