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Effects of Nitridation on 4H-SiC MOSFETs Fabricated on Various Crystal Faces

✍ Scribed by Nanen, Yuichiro; Kato, Muneharu; Suda, Jun; Kimoto, Tsunenobu

Book ID: 124087108
Publisher: IEEE
Year: 2013
Tongue: English
Weight: 151 KB
Volume: 60
Category: Article
ISSN: 0018-9383
DOI: 10.1109/TED.2012.2236333

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