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Effects of carbon additions on crystallinity and resistivity in Si–C–H thin films deposited by CVDs

✍ Scribed by Piyi Du; Chenlu Song; Wenjian Weng; Gaorong Han; Ge Shen


Book ID
108356874
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
208 KB
Volume
64
Category
Article
ISSN
0022-3697

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