✦ LIBER ✦
Influence of different carbon source gases on preparation and properties of a-Si1−XCX:H alloy films including μc-Si:H by hot-wire CVD
✍ Scribed by T Itoh; T Fujiwara; Y Katoh; K Fukunaga; S Nonomura
- Book ID
- 117145577
- Publisher
- Elsevier Science
- Year
- 2002
- Tongue
- English
- Weight
- 102 KB
- Volume
- 299-302
- Category
- Article
- ISSN
- 0022-3093
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