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Influence of helium dilution of silane on microstructure and opto-electrical properties of hydrogenated nanocrystalline silicon (nc-Si:H) thin films deposited by HW-CVD

✍ Scribed by V.S. Waman; M.M. Kamble; S.S. Ghosh; R.R. Hawaldar; D.P. Amalnerkar; V.G. Sathe; S.W. Gosavi; S.R. Jadkar

Book ID: 119322589
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 959 KB
Volume: 47
Category: Article
ISSN: 0025-5408
DOI: 10.1016/j.materresbull.2012.07.008

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