✦ LIBER ✦

Effect of microwave power on diamond-like carbon films deposited using electron cyclotron resonance chemical vapor deposition

✍ Scribed by Yoon, S.F.; Tan, K.H.; Rusli, J.; Ahn, ; Huang, Q.F.

Book ID: 123272411
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 232 KB
Volume: 9
Category: Article
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(00)00360-5

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Mechanical and Tribological Properties o

Mechanical and Tribological Properties of Diamond-Like Carbon Films Deposited by Electron Cyclotron Resonance Microwave Plasma Chemical Vapor Deposition

✍ Qi Jun; Luo Jianbin; Wang Kunlin; Wen Shizhu 📂 Article 📅 2003 🏛 Springer US 🌐 English ⚖ 264 KB

Effects of microwave power and bias volt

Effects of microwave power and bias voltage on deposition of amorphous hydrogenated carbon films using electron cyclotron resonance plasma chemical vapour deposition

✍ K. Maruyama; T. Inoue; M. Yamamoto; T. Morinaga; H. Saitoh; K. Kamata 📂 Article 📅 1994 🏛 Springer 🌐 English ⚖ 327 KB

Low-Temperature Synthesis of Diamond-lik

Low-Temperature Synthesis of Diamond-like Carbon Films on Steel Substrates by Electron-Cyclotron-Resonance Plasma-Enhanced Chemical Vapor Deposition

✍ Shen Zhu; Fatemeh Shahedipour; Henry W. White 📂 Article 📅 2005 🏛 John Wiley and Sons 🌐 English ⚖ 343 KB

Preparation of diamondlike carbon films

Preparation of diamondlike carbon films by electron cyclotron resonance chemical vapor deposition

✍ Nagai, I.; Ishitani, A.; Kuroda, H.; Yoshikawa, M.; Nagai, N. 📂 Article 📅 1990 🏛 American Institute of Physics 🌐 English ⚖ 538 KB

Hydrogenated amorphous carbon films depo

Hydrogenated amorphous carbon films deposited in an electron cyclotron resonance–chemical vapor deposition discharge reactor using acetylene

✍ Kim, B.K.; Grotjohn, T.A. 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 123 KB

Low Temperature Synthesis of Diamond Fil

Low Temperature Synthesis of Diamond Films with Electron Cyclotron Resonance Plasma Chemical Vapor Deposition

✍ Mantei, Thomas D.; Ring, Zoltan; Schweizer, Mark; Tlali, Spirit; Jackson, Howard 📂 Article 📅 1996 🏛 Institute of Pure and Applied Physics 🌐 English ⚖ 850 KB