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Hydrogenated amorphous carbon films deposited in an electron cyclotron resonance–chemical vapor deposition discharge reactor using acetylene

✍ Scribed by Kim, B.K.; Grotjohn, T.A.


Book ID
122469621
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
123 KB
Volume
9
Category
Article
ISSN
0925-9635

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