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Molybdenum-containing carbon films deposited using the screen grid technique in an electron cyclotron resonance chemical vapor deposition system

✍ Scribed by Huang, Q.F; Yoon, S.F; Rusli, ; Yang, H; Ahn, J; Zhang, Q

Book ID: 122513164
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 222 KB
Volume: 9
Category: Article
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(99)00221-6

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