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DC bias effects in the deposition of a-C:H films using the screen-grid method in electron cyclotron resonance chemical vapour deposition

โœ Scribed by Yoon, S.F; Rusli, ; Ahn, J; Zhang, Q; Wu, Y.S; Yang, H

Book ID
123227112
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
191 KB
Volume
7
Category
Article
ISSN
0925-9635

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Amorphous carbon film deposition using a
Amorphous carbon film deposition using a DC-biased screen-grid in an electron cyclotron resonance plasma
โœ SF Yoon; Ruslie; J Ahn; Q Zhang; YS Wu; H Yang ๐Ÿ“‚ Article ๐Ÿ“… 1998 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 330 KB

The deposition of hydrogenated amorphous carbon (a-C:H) films from a mixture of hydrogen and methane using the electron cyclotron resonance chemical vapour deposition (ECR-CVD) method is reported. A screen grid positioned above the substrate was used to provide an electric field to accelerate the io