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Control of ion energy using a screen-grid in an electron cyclotron resonance chemical vapour deposition system

✍ Scribed by Rusli, E; Yoon, S.F; Wu, Y.S; Yang, H; Ahn, J; Zhang, Q

Book ID: 122667805
Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 109 KB
Volume: 8
Category: Article
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(98)00335-5

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