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Preparation of diamondlike carbon films by electron cyclotron resonance chemical vapor deposition

โœ Scribed by Nagai, I.; Ishitani, A.; Kuroda, H.; Yoshikawa, M.; Nagai, N.


Book ID
126557087
Publisher
American Institute of Physics
Year
1990
Tongue
English
Weight
538 KB
Volume
67
Category
Article
ISSN
0021-8979

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