𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Effect of hydrogen content on the ZnO thin films on the surface of polyethylene terephthalate substrate through electron cyclotron resonance-metal organic chemical vapor deposition

✍ Scribed by J. H. Park; D. Byun; B. J. Jeon; J. K. Lee


Book ID
106393882
Publisher
Springer
Year
2008
Tongue
English
Weight
635 KB
Volume
43
Category
Article
ISSN
0022-2461

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


Effects of process parameters on the str
✍ Dong Xie; Hengjun Liu; Xingrui Deng; Y.X. Leng; Nan Huang πŸ“‚ Article πŸ“… 2010 πŸ› Elsevier Science 🌐 English βš– 450 KB

The paper presents the investigation of the effect of the process parameters on the structure of hydrogenated amorphous carbon (a-C:H) films deposited on Si(100) substrate by electron cyclotron resonance microwave plasma chemical vapor deposition method (ECR-PCVD). The investigation is based on an o