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Effects of annealing treatment on the formation of CO2 in ZnO thin films grown by metal-organic chemical vapor deposition

โœ Scribed by Gaolin Zheng; Anli Yang; Hongyuan Wei; Xianglin Liu; Huaping Song; Yan Guo; Caihong Jia; Chunmei Jiao; Shaoyan Yang; Qinsheng Zhu; Zhanguo Wang

Book ID
108064191
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
689 KB
Volume
256
Category
Article
ISSN
0169-4332

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๐Ÿ“œ SIMILAR VOLUMES

Annealing effects on electrical and opti
Annealing effects on electrical and optical properties of ZnO films deposited on GaAs by metal organic chemical vapor deposition
โœ Jingchang Sun; Hongwei Liang; Jianze Zhao; Qiuju Feng; Jiming Bian; Ziwen Zhao; ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 575 KB

## 2. Experimental procedures ZnO film was deposited on the SI-GaAs (100) substrate by MOCVD. Diethylzinc (DEZn) and O 2 were chosen as precursor of Zn and O, respectively, and high purity Ar was used as the carrying gas for DEZn. The mol flux ratio of Zn to O was kept at 1:250. The