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Effect of GaAs Surface Treatments on Lanthanum Silicate High-K Dielectric Gate Stack Properties

✍ Scribed by Lichtenwalner, Daniel J; Suri, Rahul; Misra, Veena

Book ID: 118239189
Publisher: Cambridge University Press
Year: 2008
Weight: 142 KB
Volume: 1073
Category: Article
ISSN: 0272-9172
DOI: 10.1557/proc-1073-h06-04

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