Physical and electrical characterizations of metal-oxide-semiconductor capacitors fabricated on GaAs substrates with different surface chemical treatments and Al[sub 2]O[sub 3] gate dielectric

✍ Scribed by Garcia-Gutierrez, Domingo I. ;Shahrjerdi, Davood ;Kaushik, Vidya ;Banerjee, Sanjay K.

• Book ID: 121647350
• Publisher: AVS (American Vacuum Society)
• Year: 2009
• Tongue: English
• Weight: 727 KB
• Volume: 27
• Category: Article
• ISSN: 0734-211X
• DOI: 10.1116/1.3256229