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The effect of Si surface nitridation on the interfacial structure and electrical properties of (La2O3)0.5(SiO2)0.5 high-k gate dielectric films

โœ Scribed by L.G. Gao; K.B. Yin; L. Chen; H.X. Guo; Y.D. Xia; J. Yin; Z.G. Liu


Book ID
108064098
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
605 KB
Volume
256
Category
Article
ISSN
0169-4332

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