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Effect of post-deposition annealing on structural and electrical properties of high-k HoTiO3 gate dielectrics

โœ Scribed by Tung-Ming Pan; Li-Chen Yen; Sheng-Han Su


Book ID
108064155
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
378 KB
Volume
256
Category
Article
ISSN
0169-4332

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