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Effects of sputter deposition parameters and post-deposition annealing on the electrical characteristics of LaAlO3dielectric films on Si

✍ Scribed by V. Edon; M.C. Hugon; B. Agius; L. Miotti; C. Radtke; F. Tatsch; J.J. Ganem; I. Trimaille; I.J.R. Baumvol

Publisher: Springer
Year: 2006
Tongue: English
Weight: 466 KB
Volume: 83
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s00339-006-3484-5

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