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Effect of deposition conditions on the chemical bonding in sputtered carbon nitride films

✍ Scribed by Axén, N.; Botton, G.A.; Somekh, R.E.; Hutchings, I.M.


Book ID
123553140
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
710 KB
Volume
5
Category
Article
ISSN
0925-9635

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