✦ LIBER ✦

Effect of deposition conditions on internal stresses and microstructure of reactively sputtered tungsten nitride films

✍ Scribed by Y.G Shen; Y.W Mai

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Effect of deposition conditions on the p

✍ Jeong-Youb Lee; Seok-Ryong Jeon; Jong-Wan Park 📂 Article 📅 1996 🏛 Springer 🌐 English ⚖ 625 KB

Stresses, microstructure and resistivity

✍ M.C. Hugon; F. Varniere; B. Agius; M. Froment; C. Arena; J. Bessot 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 451 KB

Residual stress, microstructure, and str

✍ Shen, Y. G.; Mai, Y. W.; Zhang, Q. C.; McKenzie, D. R.; McFall, W. D.; McBride, 📂 Article 📅 2000 🏛 American Institute of Physics 🌐 English ⚖ 477 KB

Effect of deposition conditions on the c

✍ Axén, N.; Botton, G.A.; Somekh, R.E.; Hutchings, I.M. 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 710 KB

Microstructure and properties of silicon

✍ Kim, Joo Han; Chung, Ki Woong 📂 Article 📅 1998 🏛 American Institute of Physics 🌐 English ⚖ 916 KB

Effect of microstructure on the nanomech

✍ Zue-Chin Chang; Shih-Chang Liang; Sheng Han 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 921 KB