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Effect of deposition conditions on the physical and electrical properties of reactive sputtered molybdenum nitride film

โœ Scribed by Jeong-Youb Lee; Seok-Ryong Jeon; Jong-Wan Park


Book ID
104847815
Publisher
Springer
Year
1996
Tongue
English
Weight
625 KB
Volume
15
Category
Article
ISSN
0261-8028

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