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Bonding structure of carbon nitride films deposited by reactive plasma beam sputtering

โœ Scribed by Angleraud, B; Mubumbila, N; Tessier, P.Y; Fernandez, V; Turban, G


Book ID
123263837
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
120 KB
Volume
10
Category
Article
ISSN
0925-9635

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