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Ion beam deposited carbon nitride films: characterization and identification of chemical sputtering

✍ Scribed by P. Hammer; M.A. Baker; C. Lenardi; W. Gissler

Book ID: 114086103
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 329 KB
Volume: 290-291
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(96)09061-x

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