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Characterization of carbon nitride thin films prepared by dual ion beam sputtering

✍ Scribed by Fernandez, A.; Prieto, P.; Quiros, C.; Sanz, J. M.; Martin, J.‐M.; Vacher, B.


Book ID
118258112
Publisher
American Institute of Physics
Year
1996
Tongue
English
Weight
537 KB
Volume
69
Category
Article
ISSN
0003-6951

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