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Carbon nitride films synthesized by dual ion beam sputtering

✍ Scribed by P. Prieto; C. Quirós; E. Elizalde; A. Fernandez; J.M. Martin; J.M. Sanz

Book ID: 114168474
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 379 KB
Volume: 122
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(96)00566-6

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