Carbon nitride films synthesized by elec
Carbon nitride films synthesized by electron beam evaporation of carbon and nitrogen ion bombardment
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P. Petrov; D. Dimitrov; G Beshkov; V. Krastev; S. Nemska; Ch. Georgiev
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Article
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1999
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Elsevier Science
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English
β 115 KB
Carbon nitride thin films deposited on Si(1 0 0) have been synthesized by electron beam evaporation of graphite in nitrogen atmosphere for various N pressures and at different substrate temperatures. The layers were analyzed by X-ray photoelectron spectra, Fourier transforms infrared spectroscopy an