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Boron-carbon-nitrogen films synthesized by laser ablation under ion beam bombardment

✍ Scribed by Zhong-Min Ren; Yuan-Cheng Du; Zhi-Feng Ying; Fu-Ming Li; Jing Lin; Yun-Zhu Ren; Xiang-Fu Zong


Book ID
114194257
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
408 KB
Volume
50
Category
Article
ISSN
0254-0584

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Carbon nitride thin films deposited on Si(1 0 0) have been synthesized by electron beam evaporation of graphite in nitrogen atmosphere for various N pressures and at different substrate temperatures. The layers were analyzed by X-ray photoelectron spectra, Fourier transforms infrared spectroscopy an