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Raman characteristics of carbon nitride synthesized by nitrogen-ion-beam-assisted pulsed laser deposition

✍ Scribed by Z.Y. Chen; J.P. Zhao; T. Yano; T. Ooie


Publisher
Springer
Year
2002
Tongue
English
Weight
109 KB
Volume
74
Category
Article
ISSN
1432-0630

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Carbon nitride thin films deposited on Si(1 0 0) have been synthesized by electron beam evaporation of graphite in nitrogen atmosphere for various N pressures and at different substrate temperatures. The layers were analyzed by X-ray photoelectron spectra, Fourier transforms infrared spectroscopy an