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Influence of substrate temperature and ion-beam energy on the syntheses of aluminium nitride thin films by nitrogen-ion-assisted pulsed-laser deposition

✍ Scribed by Y.W. Goh; Y.F. Lu; Z.M. Ren; T.C. Chong


Publisher
Springer
Year
2003
Tongue
English
Weight
853 KB
Volume
77
Category
Article
ISSN
1432-0630

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