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Effect of process parameters on the mechanical properties of carbon nitride thin films synthesized by plasma assisted pulsed laser deposition

✍ Scribed by M. Tabbal; P. Mérel; M. Chaker

Publisher
Springer
Year
2004
Tongue
English
Weight
183 KB
Volume
79
Category
Article
ISSN
1432-0630

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Thin films of phase-pure perovskite PLT [(Pb 0.72 La 0.28 )Ti 0.93 O 3 ] were deposited in-situ onto Pt(1 1 1)/Ti/SiO 2 /Si(1 0 0) substrates by pulsed laser deposition from a stoichiometric target. We have systematically investigated the variation of grain sizes depending on the process conditions.