Influence of assisted ion energy on surface roughness and mechanical properties of boron carbon nitride films synthesized by DIBSD

✍ Scribed by X.M. Yang; X.M. Wu; L.J. Zhuge; F. Zhou

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 583 KB
• Volume: 255
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2008.11.025