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Characterization of carbon nitride films modified by low energy ion-beam bombardment

✍ Scribed by Ren Zhong-Min; Du Yuan-Cheng; Ying Zhi-Feng; Li Fu-Ming; Lin Jing; Ren Yun-Zhu; Zong Xiang-Fu

Book ID: 113287987
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 419 KB
Volume: 117
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(96)00322-9

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