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Effect of atomic-layer-deposited AlN on near-surface InGaAs/GaAs structures

✍ Scribed by Päivi Mattila; Markus Bosund; Henri Jussila; Turkka Tuomi; Juha Riikonen; Teppo Huhtio; Harri Lipsanen; Markku Sopanen

No coin nor oath required. For personal study only.

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