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Effect of Metal Buffer Layer on Surface Acoustic Wave in AlN/Diamond Structure

✍ Scribed by Sung, Chia-Chi; Chiang, Yuan-Feng; Ro, Ruyen; Lee, Ruyue; Wu, Sean

Book ID
111864382
Publisher
Taylor and Francis Group
Year
2010
Tongue
English
Weight
297 KB
Volume
408
Category
Article
ISSN
0015-0193

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## Abstract This paper describes a general finite element method (FEM) for the AC steady state analysis of two‐dimensional piezoelectric devices. The method is applied to a diamond based surface acoustic wave (SAW) layered structure. We determined the penetration depth of the elastic waves correspo