FEM modelling of surface acoustic wave in diamond layered structure

✍ Scribed by Le Brizoual, L. ;Sarry, F. ;Moreira, F. ;Elmazria, O.

• Publisher: John Wiley and Sons
• Year: 2006
• Tongue: English
• Weight: 802 KB
• Volume: 203
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.200671106

✦ Synopsis

Abstract

This paper describes a general finite element method (FEM) for the AC steady state analysis of two‐dimensional piezoelectric devices. The method is applied to a diamond based surface acoustic wave (SAW) layered structure. We determined the penetration depth of the elastic waves corresponding to ZnO layer of 1 µm thick and spatial periodicity of 4 µm. The structure admittance response shows six peaks corresponding to the mode 0, 1 and 2. The penetration depth in diamond is around 8 µm except for the mode 2 where it reaches 12 µm. (© 2006 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)