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Investigation of Surface Sputtering and Post Annealing Effects on Atomic Layer Deposited and

✍ Scribed by Qian Tao; Jursich, G.M.; Takoudis, C.


Book ID
114669481
Publisher
IEEE
Year
2011
Tongue
English
Weight
545 KB
Volume
24
Category
Article
ISSN
0894-6507

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