Effect of post-deposition vacuum annealing on properties of ITO layers
✍ Scribed by M Libra; L Bárdoš
- Publisher
- Elsevier Science
- Year
- 1988
- Tongue
- English
- Weight
- 326 KB
- Volume
- 38
- Category
- Article
- ISSN
- 0042-207X
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📜 SIMILAR VOLUMES
The effect of different annealing methods on the sheet resistance of indium tin oxide (ITO) on polyimide (PI) substrate has been investigated. ITO thin films were prepared by RF magnetron sputtering in pure Ar gas and electro-annealing, this was carried out in the flow of an electric current at seve
## Abstract The effect of vacuum annealing on the properties of graphene is investigated by using Raman spectroscopy and electrical measurement. Heavy hole doping on graphene with concentration as high as 1.5 × 10^13^ cm^−2^ is observed after vacuum annealing and exposed to an air ambient. This dop