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Surface morphology of AlN buffer layer and its effect on GaN growth by metalorganic chemical vapor deposition

✍ Scribed by Zhao, D. G.; Zhu, J. J.; Liu, Z. S.; Zhang, S. M.; Yang, Hui; Jiang, D. S.

Book ID: 120939742
Publisher: American Institute of Physics
Year: 2004
Tongue: English
Weight: 464 KB
Volume: 85
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.1784034

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