Surface chemistry of Al(CH3)3 and TiCl4 on GaAs(100) and InGaAs during the first half-cycle of atomic layer deposition

✍ Scribed by Granados, B.; Lie, F.; Muscat, A.

• Book ID: 121251216
• Publisher: Cambridge University Press
• Year: 2012
• Tongue: English
• Weight: 334 KB
• Volume: 18
• Category: Article
• ISSN: 1431-9276
• DOI: 10.1017/S1431927612006381