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Adsorption Reactions of Dimethylaluminum Isopropoxide and Water on the H/Si(100)-2 × 1 Surface: Initial Reactions for Atomic Layer Deposition of Al 2 O 3

✍ Scribed by Ghosh, Manik Kumer; Choi, Cheol Ho

Book ID: 126844242
Publisher: American Chemical Society
Year: 2006
Tongue: English
Weight: 889 KB
Volume: 110
Category: Article
ISSN: 0022-3654
DOI: 10.1021/jp060342c

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