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Modelling of ZrO2 deposition from ZrCl4 and H2O on the Si(1 0 0) surface: initial reactions and surface structures

✍ Scribed by V.V. Brodskii; E.A. Rykova; A.A. Bagatur'yants; A.A. Korkin

No coin nor oath required. For personal study only.

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Modelling of ZrO2 deposition from ZrCl4 and H2O on the Si(1&#xa0;0&#xa0;0) surface: initial reactions and surface structures