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Initial stages of ZrO2 chemical vapor deposition on Si(1 0 0)-(2 × 1) from zirconium tetra-tert-butoxide

✍ Scribed by P.G. Karlsson; E. Göthelid; J.H. Richter; A. Sandell

No coin nor oath required. For personal study only.

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Initial stages of ZrO2 chemical vapor deposition on Si(1&#xa0;0&#xa0;0)-(2&#xa0;×&#xa0;1) from zirconium tetra-tert-butoxide