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Effect of AlN interlayers on growth stress in GaN layers deposited on (111) Si

โœ Scribed by Raghavan, Srinivasan; Weng, Xiaojun; Dickey, Elizabeth; Redwing, Joan M.


Book ID
120323291
Publisher
American Institute of Physics
Year
2005
Tongue
English
Weight
382 KB
Volume
87
Category
Article
ISSN
0003-6951

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